Abstract：Industry-university-research cooperative innovation is a hot issue in academic circles recently. The proximities among regions have great impact on industry-university-research collaboration innovation. This article firstly defines the technology proximity, society proximity, relation proximity, institutional proximity and geographic proximity between regions, then puts forward the concept model of the relation between different dimension proximity. On the basis of carding the interrelated researches, this paper takes geographical proximity as an important factor for the industry-university-research cooperative innovation, and tries to reveal its influencing mechanism. By using partial least squares (PLS), the paper builds structural equation model, then integrates the other proximities into a unified framework to analyze the influence of geographical proximity to cross-regional collaborative innovation performance. A statistical analysis based on China local industry-university-research cooperative innovation is then made to explore the geographical proximity effects between the university and enterprise. The results show:geographical proximity is the first dimension of multidimensional proximity, and other proximities are acting on collaborative innovation performance under the geographical proximity; although society proximity positively effects on technology proximity and relation proximity, it can't indirectly impact on collaborative innovation performance through technology and the relation proximity; society proximity and relation proximity influence collaborative innovation significantly. In order to achieve optimization of technology resources, it is nec· essary to speed up the integration of the institution, market and infrastructure.
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